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'C2AB28B5;L=>ABL A5=A>@0 >F5=820;0AL A ?><>ILN :>MDD8F85=B0 GC2AB28B5;L=>AB8 S = (R>  Rg)/Rg, ?@8 Ro > Rg, S = (Rg  Ro)/Rg, ?@8 Ro < Rg, 345 Ro  8AE>4=>5 A>?@>B82;5=85 A5=A>@0 =0 2>74CE5, Rg  A>?@>B82;5=85, ?@8 2>7459AB288 =0 A5=A>@ >?@545;5==>3> 3070. #25;8G5=85 GC2AB28B5;L=>AB8 =0 >1@07F0E, ?>;CG5==KE ?@8 1>;LH59 ?;>B=>AB8 B>:0 0=>48@>20=8O >1JOA=O5BAO C25;8G5=85< ?;>B=>AB8 ?>25@E=>AB=KE A>AB>O=89, :>B>@K5 >?@545;O;8AL 87 M:A?5@8<5=B0;L=KE C-V E0@0:B5@8AB8:. =0;87 C-V E0@0:B5@8AB8: ?>:070;, GB> ?;>B=>ABL ?>25@E=>AB=KE A>AB>O=89 (Nss) C25;8G8205BAO A 6.1013 A<-2 4> 1.2.1014 A<-2 4;O >1@07F>2 ?>;CG5==KE ?@8 ?;>B=>ABOE B>:0 0=>48@>20=8O 35 8 70 </A<2, A>>B25BAB25==>. ;O <>=>:@8AB0;;8G5A:>3> SiC, Nss A>AB02;O;0 2.1015 A<-2. #25;8G5=85 B5<?5@0BC@K <0:A8<0;L=>9 GC2AB28B5;L=>AB8 >1@07F>2 A5=A>@>2, ?>;CG5==KE ?@8 ?>2KH5==KE ?;>B=>ABOE B>:0 0=>48@>20=8O, <>6=> >1JOA=8BL C25;8G5=85< M=5@388 04A>@1F8>==KE F5=B@>2, GB> ?>4B25@6405BAO C25;8G5=85< 2@5<5=8 >B:;8:0 MB8E >1@07F>2 (@8A.7).  8A. 6. "5<?5@0BC@=0O 7028A8<>ABL GC2AB28B5;L=>AB8 1  <>=>:@8AB0;;8G5A:>3> 6H-SiC, 2  ?>@8AB>3> SiC, ?>;CG5==>3> ?@8 ?;>B=>AB8 B>:0 0=>48@>20=8O j=35 </A<2, 3- ?>@8AB>3> SiC, ?;>B=>ABL B>:0 0=>48@>20=8O j=70 </A<2, 4 - ?>@8AB>3> SiC, ?;>B=>ABL B>:0 0=>48@>20=8O j=140 </A<2. >=F5=B@0F8O 0<<80:0  500 ppm.0 @8A. 7 8 8 ?>:070=K 7028A8<>AB8 2@5<5=8 >B:;8:0 8 2@5<5=8 2>AAB0=>2;5=8O ?>@8AB>3> :0@1840 :@5<=8O >B B5<?5@0BC@K. ! @>AB>< B5<?5@0BC@K 2@5<O >B:;8:0 8 2@5<O 2>AAB0=>2;5=8O A5=A>@0 C<5=LH0NBAO, GB> A2O70=> A C25;8G5=85< A:>@>AB8 ?>25@E=>AB=KE @50:F89 =0 3@0=8F5 @0745;0 ?>@8ABK9 A;>9/8AA;54C5<K9 307.  8A. 7. "5<?5@0BC@=0O 7028A8<>ABL 2@5<5=8 >B:;8:0 A5=A>@>2, AD>@<8@>20==KE ?@8 ?;>B=>ABOE B>:0 0=>48@>20=8O: 1- j=35 </A<2, 2- j=140 </A<2 8A. 8. "5<?5@0BC@=0O 7028A8<>ABL 2@5<5=8 2>AAB0=>2;5=8O A5=A>@0 A>60;5=8N, A0< ?>@8ABK9 :0@184 :@5<=8O >1;0405B =52KA>:>9 GC2AB28B5;L=>ABLN 8 A5;5:B82=>ABLN. 538@>20=85 53> @07;8G=K<8 <5B0;;0<8, 8 D>@<8@>20=85 >:A84=KE ?;5=>: =0 ?>25@E=>AB8 ?>@8AB>3> A;>O, <>3;8 1K @5H8BL 7040GC A5;5:B82=>AB8 8 ?>2KA8BL GC2AB28B5;L=>ABL A5=A>@0 : @07;8G=K< 3070<. 0<8 1K;8 ?>;CG5=K 8 8AA;54>20=K =0 307>GC2AB28B5;L=>ABL ?;5=:8 42C>:8A8 B8B0=0 =0 ?>@8AB>< :0@1845 :@5<=8O.  @57C;LB0B5 ?@>2545==KE 8AA;54>20=89 GC2AB28B5;L=>AB8 ?;5=>: TiO2 =0 ?>@8AB>< SiC : 0<<80:C, ?@>?0=C, NO2 8 H2O2 1K;> CAB0=>2;5=>, GB> =0 >1@07F0E, ?>;CG5==KE ?@8 1>;LH59 ?;>B=>AB8 B>:0 0=>48@>20=8O, GC2AB28B5;L=>ABL : 2KH5=0720==K< 3070< 1K;0 2KH5. 8AB>3@0<<K =0 @8A. 9 >B@060NB B5<?5@0BC@=CN 7028A8<>ABL GC2AB28B5;L=>AB8 ?;5=>: TiO2, AD>@<8@>20==KE =0 <>=>:@8AB0;;8G5A:>< SiC ( 8A.9, 0) 8 =0 ?>@8AB>< SiC, :>B>@K9 1K; ?>;CG5= ?@8 ?;>B=>AB8 B>:0 0=>48@>20=8O j = 140 mA/cm2 (@8A.9, 1) : ?0@0< ?@>?0=0, 0<<80:0, 48>:A840 07>B0 8 ?5@5:8A8 2>4>@>40, :>=F5=B@0F859 500 ppm. 0:A8<0;L=0O GC2AB28B5;L=>ABL =01;N40;0AL : ?@>?0=C 8 NO2. >A:>;L:C >4=8 307K 2K7K20NB C25;8G5=85 ?@>2>48<>AB8 307>GC2AB28B5;L=KE A;>52 TiO2 (?@>?0=, 0<<80:), 0 4@C385  55 C<5=LH5=85 (NO2, H2O2), B> 7040G0 @0A?>7=020=8O 307>2 @07=>3> B8?0 =5 O2;O5BAO A;>6=>9. 4=0:>, 2 A;CG05 307>2 >4=>3> B8?0, A ?><>ILN >4=>3> 40BG8:0 =5 C405BAO 2KOA=8BL, G5< 2K720=> 87<5=5=85 ?@>2>48<>AB8 A;>O  284>< 3070 8;8 53> :>;8G5AB2><. 0)1) 8A.9. "5<?5@0BC@=0O 7028A8<>ABL GC2AB28B5;L=>AB8 ?;5=:8 TiO2, AD>@<8@>20==>9 =0: 0) <>=>-SiC, 1) =0 ?>@8AB><-SiC, ?>;CG5==>< ?@8 ?;>B=>AB8 B>:0 0=>48@>20=8O j = 140 mA/cm2 : ?@>?0=C, 0<<80:C, NO2 8 H2O2.;O @5H5=8O MB>9 ?@>1;5<K, =5>1E>48<> A>740BL <C;LB8A5=A>@=CN A8AB5<C @0A?>7=020=8O B8?0 -;5:B@>==K9 =>A.  @01>B5 ?@54;>65=0 ?5@A?5:B82=0O B5E=>;>38O A>740=8O <0B@8FK A5=A>@>2 =0 >A=>25 ?>@8AB>3> Si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iC/>:A84 <5B0;;0. #AB0=>2;5=>, GB> 480<5B@ ?>@ 2 n-6H-SiC A :>=F5=B@0F859 ?@8<5A8 1*1017 A<-3, =5>1E>48<K9 4;O A>740=8O 307>GC2AB28B5;L=>3> A;>O ?@8 ?;>B=>AB8 B>:0 0=>48@>20=8O >B 20 4> 140 </A<2, ;568B 2 480?07>=5 12-170 =<. 07@01>B0=0 ;01>@0B>@=0O B5E=>;>38O 873>B>2;5=8O A5=A>@>2 =0 >A=>25 ?>@8AB>3> SiC A 8A?>;L7>20=85< 1KAB@>3> B5@<8G5A:>3> >B6830. #AB0=>2;5=>, GB> 1KAB@K9 B5@<8G5A:89 >B683 2 20:CC<5 :>=B0:B>2 B8B0=0 : ?>@8AB><C SiC A=8605B 2KA>BC ?>B5=F80;L=>3> 10@L5@0 8 ?5@5E>4=>5 C45;L=>5 A>?@>B82;5=85 A 2*10-2 4> 2.2*10-3 <*A<2. #AB0=>2;5=>, GB> 1KAB@>5 B5@<8G5A:>5 >:8A;5=85 ?>@8AB>3> SiC 87<5=O5B AB@C:BC@C 8 D07>2K9 A>AB02 >:A84=>9 ?;5=:8 B8B0=0 =0 ?>@8AB>< SiC. >2KH5=85 B5<?5@0BC@K " 4> 1000>! AB018;878@C5B D07>2K9 A>AB02 >:A840 B8B0=0 ?> 2A59 B>;I8=5 8 ?@82>48B : D>@<8@>20=8N TiO2. ?@545;5=0 B5<?5@0BC@0 <0:A8<0;L=>9 GC2AB28B5;L=>AB8 ?>@8AB>3> :0@1840 :@5<=8O : ?0@0< 0<<80:0. #AB0=>2;5=>, GB> 4;O >1@07F>2, ?>;CG5==KE ?@8 1>;LH8E ?;>B=>ABOE B>:0 0=>48@>20=8O B5<?5@0BC@0 <0:A8<0;L=>9 GC2AB28B5;L=>AB8 A<5I05BAO 2 AB>@>=C 1>;55 2KA>:8E B5<?5@0BC@. #AB0=>2;5=>, GB> ?@8 8AA;54>20=88 GC2AB28B5;L=>AB8 : B0:8< 3070<, :0: 0<<80:, ?@>?0=, NO2 8 H2O2, <0:A8<0;L=0O GC2AB28B5;L=>ABL AB@C:BC@K ?>@8ABK9 SiC/TiO2 =01;N405BAO : ?@>?0=C. @54;>65=0 ?5@A?5:B82=0O B5E=>;>38O A>740=8O <0B@8FK A5=A>@>2 =0 >A=>25 >:A84>2 <5B0;;>2 =0 ?>@8AB>< :0@1845 :@5<=8O. A=>2=>5 A>45@60=85 48AA5@B0F88 >?C1;8:>20=> 2 A;54CNI8E @01>B0E: !25B;8G=K9 .. >A:>2G5=:> .. 0@70@Q2 ... ;8O=85 1KAB@>3> B5@<8G5A:>3> >B6830 =0 E0@0:B5@8AB8:8 Ti :>=B0:B>2 : ?>@8AB><C SiC/ "@C4K V " %8<8O B25@4>3> B5;0 8 A>2@5<5==K5 <8:@>- 8 =0=>B5E=>;>388 18-23 A5=BO1@O 2005 3. 8A;>2>4A:. 74-2> !52 02#, A. 280-281. !25B;8G=K9 .. >A:>2G5=:> .. 0@70@Q2 ... -DD5:B =0AKI5=8O ?@O<>3> B>:0 2 AB@C:BC@5 Ti/ ?>@8ABK9 SiC/ n-SiC/ "@C4K V " 8:@>M;5:B@>==K5 ?@5>1@07>20B5;8 8 ?@81>@K =0 8E >A=>25 0:C-!C<308B, 5-8 45:01@O 2005, A.107. !25B;8G=K9 .. >A:>2G5=:> .. 0@70@Q2 ... ;8O=85 35><5B@88 :>=B0:B0 Ti - ?>@8ABK9 SiC =0 53> M;5:B@8G5A:85 A2>9AB20. "@C4K V " -;5:B@>=8:0 8 8=D>@<0B8:0 -2005, >A:20, =>O1@L 2005. 74-2> -". !25B;8G=K9 .. >A:>2G5=:> .. 0@70@Q2 ... ;8O=85 " =0 E0@0:B5@8AB8:8 ><8G5A:8E :>=B0:B>2 Ti - ?>@8ABK9 SiC/ 725AB8O " "# !9 -2005, A.96. Bacherikov Yu.Yu., Konakova R.V., Okhrimenko O.B., Svetlichni A.M., Moskovchenko N.N. The theature of the photoluminescence of the annealing porous silicon carbide with titanium atoms introduced/ XVII ISSSMC  Spectroscopy of molecules and crystals , Beregove, Crimea, Ukraine, 20.09  26.09.2005, pp.171-172. !25B;8G=K9 .. >A:>2G5=:> .. >=0:>20 .. 8 4@. >@D>;>38G5A:85 8 >?B8G5A:85 A2>9AB20 A;>52 ?>@8AB>3> :0@1840 :@5<=8O, ;538@>20==>3> B8B0=></ 8AL<0 2 "$ 2006, B>< 32, 2K?.4.-!.6-10. >A:>2G5=:> .., !25B;8G=0O .., !5@10 .. >;CG5=85 8 A2>9AB20 ?>@8AB>3> :0@1840 :@5<=8O/ "5E=>;>38O 8 :>=AB@C8@>20=85 2 M;5:B@>==>9 0??0@0BC@5.-2005.-!1(55).-!.53-58. >A:>2G5=:> .., 53>45=:> .. !5=A>@K 4K<0 =0 >A=>25 >:A84>2 @54:>75<5;L=KE <5B0;;>2/  !>2@5<5==K5 8=D>@<0F8>==K5 8 M;5:B@>==K5 B5E=>;>388, 45AA0, 22-26 <0O 2006, A.157. !25B;8G=K9 .., >A:>2G5=:> .. 0:>=><5@=>AB8 D07>>1@07>20=8O 2 A8AB5<5 Ti-SiC/  !>2@5<5==K5 8=D>@<0F8>==K5 8 M;5:B@>==K5 B5E=>;>388, 45AA0, 22-26 <0O 2006.A.93. !25B;8G=K9 .., >A:>2G5=:> .. ;8O=85 @568<>2 B@02;5=8O =0 <>@D>;>38N ?>25@E=>AB8 ?>@8AB>3>-SiC/ 0B5@80;K L =0CG=>-B5E=8G5A:>9 :>=D5@5=F88. 725AB8O " "#.- !8.- 2004.- A.105. >A:>2G5=:> .. A?>;L7>20=85 ?>@8AB>3> :0@1840 :@5<=8O 2 :0G5AB25 0:B82=>3> M;5<5=B0 307>GC2AB28B5;L=KE A5=A>@>2/ 8:@>M;5:B@>=8:0 8 8=D>@<0B8:0  2006, B578AK 13-9 ", 5;5=>3@04, 19-21 0?@5;O 2006, A.52. 3552 .., >@>;52 .., >A:>2G5=:> .., C@8FK= .. "5@<>48=0<8G5A:89 0=0;87 A8=B570 :0@1840 :@5<=8O <5B>4>< B25@4>D07=KE @50:F89.  "@C4K 3-59 " 8:@>M;5:B@>==K5 ?@5>1@07>20B5;8 8 ?@81>@K =0 8E >A=>25, 0:C-!C<308B, 16-18 >:BO1@O 2001, A.78-81. Agueev O.A., Moskovchenko N.N., Svetlichnaya L.A. Synthesis and Investigation of Nanocrystalline SiC Properties in Sensors Applications/ Proc. of  The Fourth International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 02 , Smolenice Castle, Slovakia, 14-16 October, 2002, p. 59-62.  @01>B0E, >?C1;8:>20==KE 2 A>02B>@AB25, ;8G=> >A:>2G5=:> .. ?@8=04;560B @57C;LB0BK: 2 @01>B5 [1-4] <5B>48:0 D>@<8@>20=8O ?>@8AB>3> A;>O =0 :0@1845 :@5<=8O, ?@>2545=85 1KAB@>3> B5@<8G5A:>3> >B6830, @0AG5B M;5:B@8G5A:8E ?0@0<5B@>2 :>=B0:B>2, 0=0;87 @57C;LB0B>2, ?>43>B>2:0 : ?5G0B8; 2 @01>B0E [5,6] <5B>48:0 D>@<8@>20=8O ?>@8AB>3> A;>O 8 >1@01>B:0 53> 2 ; 2 @01>B5 [7] 0=0;87 ACI5AB2CNI8E 2 =0AB>OI55 2@5<O <5B>4>2 D>@<8@>20=8O ?>@8AB>3> A;>O =0 :0@1845 :@5<=8O, ?>43>B>2:0 @01>BK : ?5G0B8; 2 @01>B5 [9] ?@>2545=85 B5@<>48=0<8G5A:8E @0AG5B>2 @50:F89 2708<>459AB28O B8B0=0 8 :0@1840 :@5<=8O ?@8 2KA>:>B5<?5@0BC@=>< >B6835; 2 @01>B0E [11-13] M:A?5@8<5=B0;L=0O G0ABL 8 ?@>2545=85 @0AG5B>2. "030=@>3. "8?>3@0D8O " "#. 2006 3. 0:. !____. 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